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Read e-book online Nanoscale Calibration Standards and Methods: Dimensional and PDF

By Ganter Wilkening, Ludger Koenders

ISBN-10: 352740502X

ISBN-13: 9783527405022

The quantitative choice of the homes of micro- and nanostructures is vital in examine and improvement. it's also a prerequisite in procedure regulate and caliber insurance in undefined. the information of the geometrical dimensions of constructions often is the bottom, to which different actual and chemical houses are associated. Quantitative measurements require trustworthy and reliable tools, compatible dimension strategies in addition to applicable calibration artefacts and techniques. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and second Seminar on Nanoscale Calibration criteria and strategies) on the nationwide Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, maintains the sequence of seminars on Quantitative Microscopy. The sequence stimulates the trade of data among brands of suitable not easy- and software program and the clients in technology and industry.Topics addressed in those court cases are a) the applying of quantitative measurements and dimension difficulties in: microelectronics, microsystems expertise, nano/quantum/molecular electronics, chemistry, biology, medication, environmental expertise, fabrics technological know-how, floor processingb) calibration & correction equipment: calibration equipment, calibration criteria, calibration methods, traceable measurements, standardization, uncertainty of measurementsc) instrumentation and strategies: novel/improved tools and techniques, reproducible probe/sample positioning, position-measuring platforms, novel/improved probe/detector structures, linearization tools, picture processing

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Extra resources for Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range

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Instrum. 75, 4, 962–969 (2004). 29 G. Dai, F. -U. Danzebrink, M. Xu, and K. Hasche, A novel metrological scanning probe microscope with a measurement range up to (25 mm)2, PTB-Bericht F-48 (2003), 175–182. 21 2 Nanometrology at the IMGC M. Bisi, E. Massa, A. Pasquini, G. B. Picotto, and M. Pisani Abstract A survey of the nanometrology-related activities in progress at the Istituto di Metrologia “G. Colonnetti” (IMGC) is presented. Some special apparatus for critical measurements in the nanoscale range are described.

10 shows the metrological LR-SFM. After finishing the design of the measuring software for the complete device, extensive investigations into the metrological properties of the LR-SFM were carried out. As an example, the first results of measurements performed on a flatness standard and on a sinusoidal lattice standard are shown. 11) can be used to estimate the quality of the motion (influenced by the guidance mechanism) and to evaluate the instrument’s noise behavior. The image shows that the structure measured is very flat and that artifacts as they may, for example, be caused by the ball bearings, are not detectable.

Because of the fast data acquisition, the influence of thermal drift and other environmental factors can be reduced. Modernization of the data acquisition software, an automated sample positioning system, and the efforts taken to realize automatic measuring processes (batch processes) have further improved the handling of the device. Because of the use of laser interferometers as displacement measuring sensors, calibration of the measuring system so far required can be dispensed. This leads to a reduction of the whole measuring time.

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Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro- and Nanometer Range by Ganter Wilkening, Ludger Koenders


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