By Ohring
ISBN-10: 0125249756
ISBN-13: 9780125249751
-
"There is a necessity for brand new, complete texts and references in [advanced fabrics processing] and its subdisciplines. This has been very true for skinny motion pictures, and of the different contemporary books at the topic, Milton Ohring's large quantity is surely the best."
Praise for the 1st version , --NATURE
"Ohring's very well timed and perfect e-book fills a long-existing want in fabrics schooling on the graduate level....The ebook is especially good written, awarded, and illustrated. it's going to turn out valuable to the scientist or engineer in coatings, to the school senior engaged on a venture, and particularly to graduate scholars in fabrics technological know-how and engineering and to college focused on educating or examine within the quarter of skinny motion pictures. a good acquisition for an educational library."
--CHOICE
"The writer writes in a fluent and fascinating kind which the scholar must have little hassle in figuring out. His examples and technical insights do very much to make his textual content readable..."
--R.J. BORG
"The mixture of training, learn, and business involvement has offer Profesor Ohring with a extensive point of view of skinny movie technology and technoloy and large perception into the wishes of scholars getting into this interesting box. His perception and adventure are particularly glaring during this textbook."
--JOHN L. VOSSEN, John Vossen affiliates, Inc.
"The textual content is straightforward to learn, technically right, unfolds in a logical demeanour, and incorporates a huge variety of vital beneficial properties with regards to skinny motion pictures. I congratulate the writer for offering a considerate remedy of this more and more renowned subject."
--CHARLES L. BAUER, Carnegie Mellon college
"Professor Milt Ohring has a protracted and exact viewpoint of skinny movie technological know-how from his dealings with academia and undefined. This publication represents his amassed reviews of training and learn. skinny movie technology is on the middle of a lot of our so much complex applied sciences. This ebook should still end up important not just to the college scholar but in addition to the pro who wishes a large evaluation of this crucial field."
--J.M. POATE, AT&T Bell Laboratories
Content:
Foreword to first edition
, Page xi
Preface
, Pages xiii-xv
Acknowledgments
, Pages xvii-xviii
Historical perspective
, Pages xix-xxi
Chapter 1 - A evaluate of fabrics science
, Pages 1-56
Chapter 2 - Vacuum technological know-how and technology
, Pages 57-93
Chapter three - Thin-film evaporation processes
, Pages 95-144
Chapter four - Discharges, plasmas, and ion-surface interactions
, Pages 145-202
Chapter five - Plasma and ion beam processing of skinny films
, Pages 203-275
Chapter 6 - Chemical vapor deposition
, Pages 277-355
Chapter 7 - Substrate surfaces and thin-film nucleation
, Pages 357-415
Chapter eight - Epitaxy
, Pages 417-494
Chapter nine - movie structure
, Pages 495-558
Chapter 10 - Characterization of skinny motion pictures and surfaces
, Pages 559-640
Chapter eleven - Interdiffusion, reactions, and differences in skinny films
, Pages 641-710
Chapter 12 - Mechanical homes of skinny films
, Pages 711-781
Appendix
, Page 782
Index
, Pages 783-794
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Extra resources for Materials Science of Thin Films. Deposition and Structure
Sample text
In layered thin-film structures, phases such as solid solutions and compounds are frequently accessed horizontally across the phase diagram during an isothermal anneal. This should be contrasted with bulk materials where equilibrium phase changes commonly proceed vertically downward from elevated temperatures. 1 KINETICS MACROSCOPIC TRANSPORT Whenever a material system is not in thermodynamic equilibrium, driving forces arise naturally to push it toward equilibrium. Such a situation can occur, for example, when the free energy of a microscopic system varies from point to point because of compositional inhomogeneities.
The resultant phases that form as a function of initial reactant proportions and temperature are depicted on binary equilibrium phase diagrams. Collections of these have been published for metal, semiconductor, and ceramic systems and are among the most frequently consulted references in the field of materials. Unless noted otherwise, these diagrams hold at atmospheric pressure, in which case the variance is reduced by one. The Gibbs phase rules now states F = n + 1 or F = 3 - ~ . Thus, three phases at most can coexist in equilibrium.
To understand its use suppose it is desired to deposit 27 Thermodynamics of Materials - 50 O 1 o o Z- O lo0 nO LI. I11 -150 X O tl. O tr w z w w w _ 20c f tl. , 1 400 1 -800 1 1200 1 1600 2600 TEMPERATURE ~ Figure 1-11 Standard free energy of oxide formation vs temperature: O, melting point of metal; E], boiling point of metal (1 atm). Reprinted with permission from A. G. Guy, Introduction to Materials Science, McGraw-Hill, New York, 1972. thin-film metal interconnections on a SiO 2 substrate for microelectronic purposes.
Materials Science of Thin Films. Deposition and Structure by Ohring
by Edward
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